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Fabrication of Ge nanocrystals in SiO2 films by ion implantation: control of size and position

โœ Scribed by Kaori Masuda; Masahiro Yamamoto; Masatoshi Kanaya; Yoshihiko Kanemitsu


Book ID
117145537
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
237 KB
Volume
299-302
Category
Article
ISSN
0022-3093

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