Fabrication of free-standing microtransducers in GaAs with an electron-beam-induced oxide mask and Cl2 etching

✍ Scribed by P.C. Hoyle; J.R.A. Cleaver; H. Ahmed

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 854 KB
• Volume: 50
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/0924-4247(96)80082-3