Fabrication of diamond MISFET with micron-sized gate length on boron-doped (111) surface

✍ Scribed by Saito, Takeyasu; Park, Kyung-ho; Hirama, Kazuyuki; Umezawa, Hitoshi; Satoh, Mitsuya; Kawarada, Hiroshi; Okushi, Hideyo

• Book ID: 123355734
• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 207 KB
• Volume: 14
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/j.diamond.2005.08.044