Fabrication of diamond films under high density helium plasma formed by electron cyclotron resonance

✍ Scribed by Motokazu Yuasa; Hiroshi Kawarada; Jin Wei; Jing Sheng Ma; Jun-ichi Suzuki; Sigenobu Okada; Akio Hiraki

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 481 KB
• Volume: 49
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(91)90086-c