✦ LIBER ✦
7231. Deposition of diamond-like films by electron cyclotron resonance microwave plasmas: F S Pool and Y H Shing,J Appl Phys, 68, 1990, 62–65
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 148 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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