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Fabrication of buried channel waveguides on silicon substrates using spin-on glass

โœ Scribed by Holmes, A. S. ;Syms, R. R. A. ;Li, Ming ;Green, Mino


Book ID
115342968
Publisher
The Optical Society
Year
1993
Tongue
English
Weight
995 KB
Volume
32
Category
Article
ISSN
1559-128X

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