✦ LIBER ✦
Buried channel waveguides in plasma-enhanced chemical vapour deposited silicon oxynitride layers on silicon substrates, formed by electron-beam irradiation
✍ Scribed by J. Lewandowski; R. R. A. Syms; S. Madden; M. Green
- Publisher
- Springer
- Year
- 1991
- Tongue
- English
- Weight
- 430 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0306-8919
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