Fabrication of Au/p-Si Schottky barrier for EBIC study

✍ Scribed by Xiao Zhang; David Joy

• Book ID: 102888329
• Publisher: John Wiley and Sons
• Year: 1994
• Tongue: English
• Weight: 763 KB
• Volume: 29
• Category: Article
• ISSN: 1059-910X
• DOI: 10.1002/jemt.1070290107

✦ Synopsis

A simple method for the fabrication of a Au/p-Si Schottky barrier suitable for electron beam induced current (EBIC) study has been developed. The mechanical and electrical properties of the fabricated Aulp-Si Schottky barriers have been tested, and EBIC measurements of the dislocation contrast have been conducted using the fabricated Schottky barriers.

Scanning electron microscope, Dislocations, Monte Carlo simulation