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Fabrication of Anisotropic Metal Nanostructures Using Innovations in Template-Assisted Lithography

โœ Scribed by Tang, Zhao; Wei, Alexander


Book ID
111693845
Publisher
American Chemical Society
Year
2012
Tongue
English
Weight
978 KB
Volume
6
Category
Article
ISSN
1936-0851

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## Abstract Metalโ€assisted etching is used in conjunction with blockโ€copolymer lithography to create ordered and denselyโ€packed arrays of highโ€aspectโ€ratio singleโ€crystal silicon nanowires with uniform crystallographic orientations. Nanowires with diameters and spacings down to 19โ€‰nm and 10โ€‰nm, res