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Fabrication of a thick film sensor employing an ultrasonic oscillator

โœ Scribed by White, N.M.; Leach, G.R.

Book ID
114456811
Publisher
The Institution of Electrical Engineers
Year
1995
Tongue
English
Weight
510 KB
Volume
142
Category
Article
ISSN
1350-2344

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โœ Zenghui Zhou; Jian Xu; Yang Liao; Ya Cheng; Zhizhan Xu; Koji Sugioka; Katsumi Mi ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 369 KB

We demonstrate that a Raman sensor integrated with a micro-heater, a microfluidic chamber, and a surface-enhanced Raman scattering (SERS) substrate can be fabricated in a glass chip by femtosecond laser micromachining. The micro-heater and the SERS substrate are fabricated by selective metallization