Fabrication of an integrated Raman sensor by selective surface metallization using a femtosecond laser oscillator
✍ Scribed by Zenghui Zhou; Jian Xu; Yang Liao; Ya Cheng; Zhizhan Xu; Koji Sugioka; Katsumi Midorikawa
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 369 KB
- Volume
- 282
- Category
- Article
- ISSN
- 0030-4018
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✦ Synopsis
We demonstrate that a Raman sensor integrated with a micro-heater, a microfluidic chamber, and a surface-enhanced Raman scattering (SERS) substrate can be fabricated in a glass chip by femtosecond laser micromachining. The micro-heater and the SERS substrate are fabricated by selective metallization on the glass surface using a femtosecond laser oscillator, whereas the microfluidic chamber embedded in the glass sample is fabricated by femtosecond laser ablation using a femtosecond laser amplifier. We believed that this new strategy for fabricating multifunctional integrated microchips has great potential application for lab-on-a-chips.