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Fabrication of a novel oxygen sensor with CMOS compatible processes

✍ Scribed by Huixian Zhu; Tai-Chin Lo; Ralf Lenigk; Reinhard Renneberg

Book ID: 108469936
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 198 KB
Volume: 46
Category: Article
ISSN: 0925-4005
DOI: 10.1016/s0925-4005(98)00044-6

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