Fabrication of a negative PMMA master mold for soft-lithography by MeV ion beam lithography

✍ Scribed by Nitipon Puttaraksa; Somrit Unai; Michael W. Rhodes; Kanda Singkarat; Harry J. Whitlow; Somsorn Singkarat

• Book ID: 113823336
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 607 KB
• Volume: 272
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2011.01.053