Fabrication of a multi-level lens using independent-exposure lithography and FAB plasma etching

✍ Scribed by Woo, Do Kyun; Hane, Kazuhiro; Lee, Sun-Kyu

• Book ID: 111958094
• Publisher: Institute of Physics
• Year: 2008
• Tongue: English
• Weight: 698 KB
• Volume: 10
• Category: Article
• ISSN: 1464-4258
• DOI: 10.1088/1464-4258/10/4/044001