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Fabrication of 60 nm pitch ordered InP pillars by EB-lithography and anodization

✍ Scribed by Toshiyuki Takizawa; Masafumi Nakahara; Eijiro Kikuno; Shigehisa Arai

Book ID: 112820180
Publisher: Springer US
Year: 1996
Tongue: English
Weight: 903 KB
Volume: 25
Category: Article
ISSN: 0361-5235
DOI: 10.1007/bf02666519

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