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Fabrication of 3D micro-cantilevers based on MBE-grown strained semiconductor layers

✍ Scribed by Hiuma Iwase; Hyonkwan Choi; Masashi Akabori; Toshi-kazu Suzuki; Syoji Yamada; Daisuke Yamamoto; Toshio Ando

Book ID: 104085318
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 378 KB
Volume: 40
Category: Article
ISSN: 1386-9477
DOI: 10.1016/j.physe.2007.11.016

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