Electrical properties of BaTiO3 based ferroelectric capacitors grown on oxide sacrificial layers for micro-cantilevers applications

✍ Scribed by Giuseppe Vasta; Timothy J. Jackson; Edward Tarte

• Book ID: 113937469
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 935 KB
• Volume: 520
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2011.11.032