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Fabrication of 150-nm Al0.48In0.52As/Ga0.47In0.53As mHEMTs on GaAs substrates

✍ Scribed by Wu, XiaoFeng; Liu, HongXia; Li, HaiOu; Li, Qi; Hu, ShiGang; Xi, ZaiFang; Zhao, Jin

No coin nor oath required. For personal study only.

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