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Fabrication methods of optical resonant filters with a close-to-rectangle filtering profile

✍ Scribed by Rabady, Rabi ;Avrutsky, Ivan

Book ID
115351256
Publisher
The Optical Society
Year
2004
Tongue
English
Weight
146 KB
Volume
43
Category
Article
ISSN
1559-128X

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This paper reports on an IC-Compatible process for the fabrication of Linear Variable Optical Filter (LVOF). The LVOF is integrated with a detector array to result in a micro-spectrometer. The technological challenge in fabrication of an LVOF is fabrication of a well-controlled tapered cavity layer.