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Fabrication, characterisation and modelling of integrated on-silicon inductors

✍ Scribed by R. Murphy-Arteaga; J. Huerta-Chua; A. Dı́az-Sánchez; A. Torres-Jacome; W. Calleja-Arriaga; M. Landa-Vázquez


Book ID
108361944
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
231 KB
Volume
43
Category
Article
ISSN
0026-2714

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Integrated inductors on porous silicon
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## Abstract We examine porous Si as a thick RF‐isolation layer for on‐chip inductors and separate the loss sources that downgrade the __Q__ factors into their material components, namely Si substrate loss and metal types common to standard CMOS technologies. First we validate theoretical designs wi

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