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Fabrication and simulation of novel ultra-thin 3D silicon detectors

✍ Scribed by Pellegrini, G.; Garcia, F.; Balbuena, J.; Cabruja, E.; Lozano, M.; Orava, R.; Ullan, M.

Book ID
108223734
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
290 KB
Volume
604
Category
Article
ISSN
0168-9002

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## Abstract Ultra thin (8 nm) silicon nanowires have been fabricated by Atomic Force Microscopy (AFM) lithography on an insulator layer starting from Silicon On Insulator (SOI) substrates. Electrical measurements reveal a high sensitivity of the electron transport in these ultra thin wires to the c