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Fabrication and simulation of glass micromachining using CO2laser processing with PDMS protection

✍ Scribed by C. K. Chung, S. L. Lin, H. Y. Wang, T. K. Tan, K. Z. Tu, H. F. Lung

Book ID: 120782687
Publisher: Springer
Year: 2013
Tongue: English
Weight: 916 KB
Volume: 113
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s00339-013-7555-0

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