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[IEEE IEEE International Conference on Robotics and Automation, 2004. Proceedings. ICRA '04. 2004 - New Orleans, LA, USA (2004.04.26-2004.05.1)] IEEE International Conference on Robotics and Automation, 2004. Proceedings. ICRA '04. 2004 - Towards automated micromachining of PMMA micro channels using CO/sub 2/ laser and sacrificial mask process

✍ Scribed by Guangyi Shi, ; Qiang Huang, ; Li, W.J.; Wenqian Huang, ; Gengchen Shi, ; Kejie Li,

Book ID: 121842327
Publisher: IEEE
Year: 2004
Weight: 659 KB
Category: Article
ISBN-13: 9780780382329
DOI: 10.1109/ROBOT.2004.1307129

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