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Fabrication and properties of high Jclead—alloy Josephson junctions

✍ Scribed by Tarutani, Y.; Van Duzer, T.


Book ID
114594337
Publisher
IEEE
Year
1983
Tongue
English
Weight
724 KB
Volume
30
Category
Article
ISSN
0018-9383

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The fabrication process of ramps for HTS ramp-edge Josephson junctions was studied. We refined a photolithography method for producing ramps having smooth surfaces without a tail structure and similar angles in a chip. Optimization of resist reflowing parameters was crucially important. It was found