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Fabrication and properties of a Si-based high-sensitivity microcalorimetric gas sensor

✍ Scribed by M. Zanini; J.H. Visser; L. Rimai; R.E. Soltis; A. Kovalchuk; D.W. Hoffman; E.M. Logothetis; U. Bonne; L. Brewer; O.W. Bynum; M.A. Richard


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
548 KB
Volume
48
Category
Article
ISSN
0924-4247

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