Fabrication and properties of a Si-based high-sensitivity microcalorimetric gas sensor
β Scribed by M. Zanini; J.H. Visser; L. Rimai; R.E. Soltis; A. Kovalchuk; D.W. Hoffman; E.M. Logothetis; U. Bonne; L. Brewer; O.W. Bynum; M.A. Richard
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 548 KB
- Volume
- 48
- Category
- Article
- ISSN
- 0924-4247
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