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Fabrication and photoluminescence properties of ZnTe and CdZnTe films by low pressure metalorganic chemical-vapour deposition

✍ Scribed by Mitsuru Ekawa; Yoichi Kawakami; Tsunemasa Taguchi; Akio Hiraki


Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
943 KB
Volume
93
Category
Article
ISSN
0022-0248

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Thin films of CdS were grown by low-pressure metalorganic chemical vapour deposition (LP-MOCVD, 10 72 Torr) on GaAs(100) and borosilicate glass using the novel single-source precursor bis(diethylmonothiocarbamato)cadmium(II). The deposition of CdS was observed at substrate temperatures of 300 8C and