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Fabrication and Optical Properties of Low-Emissivity Coatings of Indium Tin Oxide or AlSiN and Ag-Alloy Multilayer Films on Glass

✍ Scribed by Chiba, Kiyoshi; Kageyama, Takashi; Iwata, Tomoyuki; Fujimori, Naoki; Oda, Hironori

Book ID
126879066
Publisher
Institute of Pure and Applied Physics
Year
2005
Tongue
English
Weight
117 KB
Volume
44
Category
Article
ISSN
0021-4922

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Low temperature processing of high condu
Low temperature processing of high conductivity and high transparency indium–tin-oxide/Ag alloy/indium–tin-oxide multilayered thin films
✍ Zuqiang Qi; Xuekang Chen; Chuizhen Fan; Weiping Chai πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 425 KB

Indium-tin-oxide (ITO) thin films and ITO/Ag alloy/ITO multilayered thin films were deposited on glass substrates using a vertical in-line multilayer sputtering system. Ceramic ITO targets were used for the deposition of ITO layers at low substrate temperature of 100 β€’ C. It was observed that the s