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Fabrication and Functionalization of Nanochannels by Electron-Beam-Induced Silicon Oxide Deposition †

✍ Scribed by Danelon, Christophe; Santschi, Christian; Brugger, Jürgen; Vogel, Horst

Book ID: 125547329
Publisher: American Chemical Society
Year: 2006
Tongue: English
Weight: 289 KB
Volume: 22
Category: Article
ISSN: 0743-7463
DOI: 10.1021/la061321c

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