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Fabrication and Fatigue Testing of an Electrostatically Driven Microcantilever Beam

✍ Scribed by Lin, Y. C.; Hocheng, H.; Fang, W. L.; Chen, R.

Book ID: 120576505
Publisher: Taylor and Francis Group
Year: 2006
Tongue: English
Weight: 937 KB
Volume: 21
Category: Article
ISSN: 1042-6914
DOI: 10.1080/AMP-20006597

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