Characterization of carbon nitride films
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Zeze, D. A.; O'Toole, E. P.; Crawford, R. I.; Cui, N.; Anderson, C. A.; Brown, N
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Article
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1998
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John Wiley and Sons
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English
⚖ 190 KB
The Ðlms addressed here were grown using adamantane vapour in Ñowing argon/nitrogen mixtures in an (C 10 H 16 ) inductively-coupled plasma processing (ICP) vacuum rig. The Ðlms were characterized by XPS, AES, infrared spectroscopy (Fourier transform infrared (FTIR) in transmission) and atomic force