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Fabrication and characterization of well-aligned and ultra-sharp silicon nanotip array

โœ Scribed by Chi-Chang Wu; Keng-Liang Ou; Ching-Li Tseng

Book ID
118726645
Publisher
Springer-Verlag
Year
2012
Tongue
English
Weight
487 KB
Volume
7
Category
Article
ISSN
1931-7573

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## Abstract In this paper we report a new approach to fabricate gated silicon microtip arrays for field emission applications using a single mask process. The key role in the fabrication process is played by the photoelectrochemical etching of silicon in HFโ€based electrolytes. This technique is her