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Fabrication and characterization of silicon antireflection structures for infrared rays using a femtosecond laser

✍ Scribed by Sakakura, Masaaki; Shimotsuma, Yasuhiko; Miura, Kiyotaka; Hirao, Kazuyuki; Imamoto, Hiroshi; Kanehira, Shingo; Wang, Xi; Kametani, Keisuke

Book ID: 115434476
Publisher: Optical Society of America
Year: 2011
Tongue: English
Weight: 428 KB
Volume: 36
Category: Article
ISSN: 0146-9592
DOI: 10.1364/OL.36.001176

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