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Fabrication and characterization of polyvinyl-alcohol-based thin-film optical waveguides

✍ Scribed by Kumar, Rajesh


Book ID
120979083
Publisher
The International Society for Optical Engineering
Year
2004
Tongue
English
Weight
242 KB
Volume
43
Category
Article
ISSN
0091-3286

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In view of the integration within Si-based optical devices, LPCVD (low-pressure chemical vapor deposition) thin-film Si 3 N 4 waveguides have been fabricated on a Si substrate within a CMOS fabrication pilot-line. Different structures (channel, rib and strip-loaded) were designed, fabricated and cha