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Fabrication and characterization of optical waveguides in KTiOPO4

โœ Scribed by Bierlein, John D.; Ferretti, August; Brixner, Lothar H.; Hsu, William Y.

Book ID
121745270
Publisher
American Institute of Physics
Year
1987
Tongue
English
Weight
530 KB
Volume
50
Category
Article
ISSN
0003-6951

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In view of the integration within Si-based optical devices, LPCVD (low-pressure chemical vapor deposition) thin-film Si 3 N 4 waveguides have been fabricated on a Si substrate within a CMOS fabrication pilot-line. Different structures (channel, rib and strip-loaded) were designed, fabricated and cha