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Fabrication and characterization of hollow waveguide optical switch with variable air core

โœ Scribed by Bae, Chang-Hwan; Koyama, Fumio

Book ID
115404967
Publisher
Optical Society of America
Year
2005
Tongue
English
Weight
285 KB
Volume
13
Category
Article
ISSN
1094-4087

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This paper reports on an IC-Compatible process for the fabrication of Linear Variable Optical Filter (LVOF). The LVOF is integrated with a detector array to result in a micro-spectrometer. The technological challenge in fabrication of an LVOF is fabrication of a well-controlled tapered cavity layer.