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Fabrication and characterization of fluorine-doped thin oxide thin films and nanorod arrays via spray pyrolysis

โœ Scribed by B. Russo; G.Z. Cao

Publisher
Springer
Year
2007
Tongue
English
Weight
319 KB
Volume
90
Category
Article
ISSN
1432-0630

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## Abstract Transparent dielectric thin films of MgO has been deposited on quartz substrates at different temperatures between 400 and 600ยฐC by a pneumatic spray pyrolysis technique using Mg(CH~3~COO)~2~ยท4H~2~O as a single molecular precursor. The thermal behavior of the precursor magnesium acetate