Abstract
Transparent dielectric thin films of MgO has been deposited on quartz substrates at different temperatures between 400 and 600ยฐC by a pneumatic spray pyrolysis technique using Mg(CH~3~COO)~2~ยท4H~2~O as a single molecular precursor. The thermal behavior of the precursor magnesium acetate is described in the results of thermogravimetry analysis (TGA) and differential thermal analysis (DTA). The prepared films are reproducible, adherent to the substrate, pinhole free and uniform. Amongst the different spray process parameters, the substrate temperature effect has been optimized for obtaining single crystalline and transparent MgO thin films. The films crystallize in a cubic structure and Xโray diffraction measurements have shown that the polycrystalline MgO films prepared at 500ยฐC with (100) and (110) orientations are changed to (100) preferred orientation at 600ยฐC. The MgO phase formation was also confirmed with the recorded Fourier Transform Infrared (FTIR) results. The films deposited at 600ยฐC exhibited highest optical transmittivity (>80%) and the direct band gap energy was found to vary from 4.50 to 5.25 eV with a rise in substrate temperature from 500 to 600ยฐC. The measured sheet resistance and the resistivity of the film prepared at 600ยฐC were respectively 10^13^ฮฉ/โก and 2.06x10^7^ฮฉ cm. The surface morphology of the prepared MgO thin films was examined by atomic force microscopy. (ยฉ 2007 WILEYโVCH Verlag GmbH & Co. KGaA, Weinheim)