Fabrication and characterization of EUV multilayer mirrors optimized for small spectral reflection bandwidth

✍ Scribed by Y.C. Lim; T. Westerwalbesloh; A. Aschentrup; O. Wehmeyer; G. Haindl; U. Kleineberg; U. Heinzmann

• Book ID: 106023009
• Publisher: Springer
• Year: 2001
• Tongue: English
• Weight: 446 KB
• Volume: 72
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s003390000723