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Fabrication and Characterization of Camphor-based Amorphous Carbon Thin Films

โœ Scribed by Fadzilah, A.N.; Dayana, K.; Rusop, M.

Book ID
123104919
Publisher
Elsevier
Year
2013
Tongue
English
Weight
369 KB
Volume
56
Category
Article
ISSN
1877-7058

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โœ J.B. Bates; N.J. Dudney; G.R. Gruzalski; R.A. Zuhr; A. Choudhury; C.F. Luck; J.D ๐Ÿ“‚ Article ๐Ÿ“… 1993 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 407 KB

Amorphous oxide and oxynitride lithium electrolyte thin films were synthesized by r.f. magnetron sputtering of lithium silicates and lithium phosphates in Ar, Ar+O x, Ar+N" or N 2 . The composition, structure, and electrical properties of the films were characterized using ion and electron beam, X-r