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Fabrication and characteristics of ZnO thin films deposited by RF sputtering on plastic substrates for flexible display

✍ Scribed by Han, DeDong; Wang, Yi; Zhang, ShengDong; Sun, Lei; Han, RuQi; Matsumoto, Satoru; Ino, Yuji


Book ID
113083170
Publisher
Science in China Press (SCP)
Year
2011
Tongue
English
Weight
279 KB
Volume
55
Category
Article
ISSN
1674-733X

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## Abstract Transparent and conductive Al‐doped ZnO (AZO) films with thickness between 0.2 and 1.1 ΞΌm were deposited by sputtering at room temperature on glass and polyethylene terephthalate (PET) substrates. All films were polycrystalline with average crystallite size increasing when the film thic