Extraction of lateral non-uniformity statistics from Rutherford backscattering spectra

✍ Scribed by N. Marin; Y. Serruys; P. Calmon

• Book ID: 113286919
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 770 KB
• Volume: 108
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(95)00834-9