Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry

✍ Scribed by D. Mangelinck; P.S. Lee; T. Osipowitcz; K.L. Pey

• Book ID: 113822582
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 463 KB
• Volume: 215
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2003.08.040