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Extraction of ions from a plasma source and formation of beams

✍ Scribed by A. Pyszniak; A. Droździel; M. Turek; A. Latuszyński; D. Ma̧czka; J. Sielanko; Yu. A. Vaganov; Yu. V. Yushkevich

Book ID
110167470
Publisher
Springer
Year
2007
Tongue
English
Weight
189 KB
Volume
50
Category
Article
ISSN
0020-4412

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📂 Article 📅 1977 🏛 Elsevier Science 🌐 English ⚖ 135 KB

31 3127. The regulation of pressure in a radio-frequency sputtering device. (France) In order to obtain reproductible results in RF sputtering we describe here an experimental device which permits us to adjust the pressure, in the range from 2.10 -3 to 6.10-'\* torr, with a precision of +0.1 10 -'~