3130. Extraction of an ion beam from a diverter-type plasma source

• Book ID: 104264422
• Publisher: Elsevier Science
• Year: 1977
• Tongue: English
• Weight: 135 KB
• Volume: 27
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(77)80596-4

✦ Synopsis

31 3127. The regulation of pressure in a radio-frequency sputtering device. (France) In order to obtain reproductible results in RF sputtering we describe here an experimental device which permits us to adjust the pressure, in the range from 2.10 -3 to 6.10-'* torr, with a precision of +0.1 10 -'~ torr. This device associated with an UHV unit is used to evaporate thin films of various materials, the thickness of which is a lineal" function of sputtering duration.