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Extension of the temperature range of epitaxial YSZ film growth on Si(100) during magnetron sputtering

✍ Scribed by V. G. Beshenkov; A. G. Znamenskii; V. A. Marchenko; A. N. Pustovit; A. V. Chernykh

Book ID
111447942
Publisher
Springer
Year
2007
Tongue
English
Weight
236 KB
Volume
52
Category
Article
ISSN
1063-7842

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