Exposure parameters for MeV proton beam writing on SU-8

✍ Scribed by Vaida Auzelyte; Mikael Elfman; Per Kristiansson; Christer Nilsson; Jan Pallon; Natalia Arteaga Marrero; Marie Wegdén

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 476 KB
• Volume: 83
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2006.04.001