Micro-Raman spectroscopy allows one to measure stress in crystalline materials. The method is nondestructive and provides microscopic lateral resolution. In this paper we show that resonance excitation using an ultraviolet (UV) laser line strongly enhances the depth resolution in micro-Raman spectro
โฆ LIBER โฆ
Experimental validation of mechanical stress models by micro-Raman spectroscopy
โ Scribed by I. De Wolf; G. Pozzat; K. Pinardi; D.J. Howard; M. Ignat; S.C. Jain; H.E. Maes
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 299 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0026-2714
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X-ray diffraction analysis and micro-Raman spectroscopy measurements have been used for stress studies on HFCVD 18 21 diamond films with different levels of boron doping. The boron incorporation in the film varied in the range 10 -10 3 boron / cm . The grain size, obtained from SEM images, showed gr