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Experimental study of I–V characteristics of dc magnetron sputtering sources

✍ Scribed by Jiang Zengkui; Li Yungi; Wang Baoxia

Book ID: 103474207
Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 184 KB
Volume: 41
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(90)94151-f

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