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Experimental studies of O 2 /Ar plasma in a planar inductive discharge

โœ Scribed by Gudmundsson, J T; Kimura, Takashi; Lieberman, M A


Book ID
121397826
Publisher
Institute of Physics
Year
1999
Tongue
English
Weight
187 KB
Volume
8
Category
Article
ISSN
0963-0252

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