Experimental investigation of plasma recovery during the pulse-off time in plasma source ion implantation

✍ Scribed by Chung, Kyoung-Jae; Jung, BongKi; Choe, Jae-Myung; Kim, Gon-Ho; Hwang, Y.S.

• Book ID: 123375634
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 814 KB
• Volume: 547
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2013.05.073